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Applications
     Semiconductor
     ► Wafer
     ► Backgrind

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         Storage

     ► Optics
       
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   Product Application Notes:  

MP2100 Backgrind
Backgrind Control
MP2100 Disk Measurement
Optics

The MP2100 is Chapman Instruments’ latest high resolution profiler. Specially designed for surface measurements and analysis, it can be used as both a production tool for inline quality inspection, as well as a research and development tool for establishing standards and researching tolerances. The MP2100 utilizes the same non-contact measurement technology as other Chapman profilers. Users can make either high-resolution linear or circular scans quickly. The powerful, yet userfriendly, Windows® based operational software can be programmed to execute a series of routines and report the data off-line for further analysis. Password security and event viewer/error logging are standard with Chapman software. Robotic handling for 150 mm, 200 mm and 300 mm wafers is available as an option.

MP2100 Features:
• Non-contact scanning
• 0.01 nm height resolution
• 50 nm data sampling
• 0.50 µm lateral resolution
• Fast, complete circular scans (360° around wafer surface)
• Nomarski Viewing System for high definition visual inspection
• Scan lengths ranging from µm to complete circumferences (200 or 300 mm wafer)
• Roughness and waviness data from a single scan
• Non-contact 3D scans
• Automated sample positioning (X, Y, theta)
• Customized measurement sequences with multiple scans implemented with a single
  keystroke
• Automated focus acquisition
• Closed loop auto-focus system allows focus to be maintained while scanning over
  samples with varying topography
• Optional robotic handling